Perspective
Open Access
Study of Transparent Conducting Oxide (ZnO:Al) Thin Film at 723k by Nebulized Spray Pyrolysis Technique
K. Deva Arun Kumar* and S. Valanarasu
PG and Research department of Physics, Arul Anandar College, Madurai-625 514, India
K. Deva Arun Kumar et al /Int.J. TechnoChem Res. 2021,7(1),pp 40-45.
Abstract
Transparent Conducting oxide (ZnO:Al), thin film was deposited by nebulized spray pyrolysis technique
starting from zinc acetate dehydrate and aluminium chloride hexahydrate. The structural, morphological, optical and
electrical characterization on the TCO thin film such as X ray diffraction, SEM, UV-visible spectrometer and four-probe
studies are taken respectively. From the X-ray diffraction, the TCO thin film is polycrystalline in nature with hexagonal
structure and the average crystallite size is 25 nm. The most prominent X-ray diffraction peaks corresponding to [100],
[002] and [101] planes are found. The surface morphology of the prepared film shows smooth and uniform spherical
grains without creaks or pinholes and well covered to the glass substrate. High transmittance and low resistivity value is
presence of the TCO thin film. The direct band gap value is 3.31eV. The calculated value of activation energy Ea is
0.16eV for 0.1 M concentration. This technique is very simple and low cost to producing transparent conducting oxide thin
film.
starting from zinc acetate dehydrate and aluminium chloride hexahydrate. The structural, morphological, optical and
electrical characterization on the TCO thin film such as X ray diffraction, SEM, UV-visible spectrometer and four-probe
studies are taken respectively. From the X-ray diffraction, the TCO thin film is polycrystalline in nature with hexagonal
structure and the average crystallite size is 25 nm. The most prominent X-ray diffraction peaks corresponding to [100],
[002] and [101] planes are found. The surface morphology of the prepared film shows smooth and uniform spherical
grains without creaks or pinholes and well covered to the glass substrate. High transmittance and low resistivity value is
presence of the TCO thin film. The direct band gap value is 3.31eV. The calculated value of activation energy Ea is
0.16eV for 0.1 M concentration. This technique is very simple and low cost to producing transparent conducting oxide thin
film.
Keywords
Al doped ZnO, Nebulized Spray Pyrolysis, Structural, morphological, Optical and electrical measurements.
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